Supply of Pulsed UV Laser System for Semiconductor Lithography to University of Sheffield
Awarded 01 Feb 2018
About
The University of Sheffield awarded a contract to InnoLas UK Ltd for a pulsed UV visible laser system to perform interference lithography inside a semiconductor reactor, on behalf of the Department of Electronic and Electrical Engineering.
The system required a primary wavelength between 300 and 400 nm, pulse width of 0.5–10 ns, minimum pulse energy of 200 mJ, and pulse frequency of 10–25 Hz, with beam quality, stability, and divergence as critical aspects.
The contract value was £74,849.
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