Supply of Four Dry Etch and Deposition Systems to University of Leeds
University of Leeds · Awarded contract
AwardedSupply of Four Dry Etch and Deposition Systems to University of Leeds
Awarded 10 Dec 2023
Awarded10 Dec 2023
Value£2,155,581.00
SupplierOxford Instruments
AgencyUniversity of Leeds
RegionYorkshire and The Humber
CategoryManufacturing & Industrial
Expires in 1mo3y term, 97% elapsed
Awarded 10 Dec 2023Expires 10 Dec 2026
About
University of Leeds awarded a contract to Oxford Instruments for the supply of up to four dry etch and deposition systems, specifically a Deep-Silicon Reactive Ion Etcher (D-RIE), an Inductively Coupled Plasma-RIE (ICP-RIE), a parallel plate RIE, and a High-Density Plasma-enhanced Chemical Vapour Deposition system (HDP-CVD).
The contract value is £2,155,581.
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Supply of Four Dry Etch and Deposition Systems to University of Leeds
Won by Oxford Instruments · University of Leeds
£2.2Mawarded
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Turnkey FTIR System for Continuous DRE Monitoring of Semiconductor Abatement Systems – Swansea UniversityResearch & Development · Closes 9 Nov 2026
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