Supply, Installation, and Commissioning of Reactive Ion Etcher (RIE) and Inductively Coupled Plasma Reactive Ion Etcher (ICPRIE) for University of Sheffield
UNIVERSITY OF SHEFFIELD · Awarded contract
AwardedSupply, Installation, and Commissioning of Reactive Ion Etcher (RIE) and Inductively Coupled Plasma Reactive Ion Etcher (ICPRIE) for University of Sheffield
Awarded 01 Feb 2023
Awarded01 Feb 2023
Value£765,400.00
AgencyUNIVERSITY OF SHEFFIELD
RegionYorkshire and The Humber
CategoryManufacturing & Industrial
Ended 3y 4mo ago5mo term
Awarded 1 Feb 2023Expired 29 June 2023
About
University of Sheffield awarded a contract to Oxford Instruments Nanotechnology Tools Ltd.
for the supply of one Reactive Ion Etcher (RIE) and/or one Inductively Coupled Plasma Reactive Ion Etcher (ICPRIE) in two lots, with a total contract value of £765,400.
The contract covered a turnkey solution including supply, delivery, installation, commissioning, process verification, and training, as well as all import duties.
Training for technical staff in preventative maintenance operations was included where possible.
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Supply, Installation, and Commissioning of Reactive Ion Etcher (RIE) and Inductively Coupled Plasma Reactive Ion Etcher (ICPRIE) for University of Sheffield
Won by OXFORD INSTRUMENTS NANOTECHNOLOGY TOOLS LTD. (T/A OXFORD INSTRUM · UNIVERSITY OF SHEFFIELD
£765Kawarded
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Turnkey FTIR System for Continuous DRE Monitoring of Semiconductor Abatement Systems – Swansea UniversityResearch & Development · Closes 9 Nov 2026
High-Speed Spectrometer System for Two-Stage Light Gas Gun – University of Kent Impact FacilityResearch & Development · Closes 20 Nov 2026
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