Supply of Ion-Beam Miller/Etcher to University of Leeds
The University Of Leeds · Awarded contract
AwardedSupply of Ion-Beam Miller/Etcher to University of Leeds
Awarded 01 Mar 2017
Awarded01 Mar 2017
Value£442,500.00
SupplierSCIA SYSTEMS GMBH
AgencyThe University Of Leeds
RegionYorkshire and The Humber
CategoryResearch & Development
Ended 8y 8mo ago12mo term
Awarded 1 Mar 2017Expired 28 Feb 2018
About
The University of Leeds awarded a contract to SCIA Systems GmbH for an ion-beam miller/etcher for the School of Electronic and Electrical Engineering.
The system is designed for etching GMR and other magnetic stacks, III-V semiconductors, and quartz on 100 mm wafers and part-pieces mounted on a 100-mm carrier.
It is compatible with reactive gases including Cl2, O2, and CF4, and features a sample load lock and He-backside cooling with MFC control.
The equipment will support research applications requiring flexibility of use.
The contract value is £442,500.
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Supply of Ion-Beam Miller/Etcher to University of Leeds
Won by SCIA SYSTEMS GMBH · The University Of Leeds
£443Kawarded
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