UNIVERSITY OF SOUTHAMPTON · Awarded contract
Awarded

Supply of 200mm Wafer Rapid Thermal Anneal Tool to University of Southampton

Awarded 11 Oct 2020

View live tenders
Awarded11 Oct 2020
Value£117,576.00
RegionSouth East
CategoryManufacturing & Industrial
Ended 5y 1mo ago1y term
Awarded 11 Oct 2020Expired 11 Oct 2021

University of Southampton awarded a contract to ECM Technologies for the provision of a 200mm wafer capable Rapid Thermal Anneal (RTA) tool for the Zepler Institute Nanofabrication Facility cleanroom.

The tool, capable of processing 200mm wafers under a hydrogen ambient, supports research in silicon photonics and the facility's transition to full 200mm wafer capability.

The contract includes delivery, commissioning, user acceptance testing, user training, and a minimum 12-month warranty covering parts, labour, and onsite engineer visits.

Shipping is on DDP incoterms.

The contract value is £117,576.

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