Supply of 200mm Wafer Rapid Thermal Anneal Tool to University of Southampton
Awarded 11 Oct 2020
About
University of Southampton awarded a contract to ECM Technologies for the provision of a 200mm wafer capable Rapid Thermal Anneal (RTA) tool for the Zepler Institute Nanofabrication Facility cleanroom.
The tool, capable of processing 200mm wafers under a hydrogen ambient, supports research in silicon photonics and the facility's transition to full 200mm wafer capability.
The contract includes delivery, commissioning, user acceptance testing, user training, and a minimum 12-month warranty covering parts, labour, and onsite engineer visits.
Shipping is on DDP incoterms.
The contract value is £117,576.
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