Award of Atomic Layer Deposition System to Ultratech Inc. by University of Warwick
The University of Warwick · Awarded contract
AwardedAward of Atomic Layer Deposition System to Ultratech Inc. by University of Warwick
Awarded 02 Jul 2017
Ended 8y 4mo ago12mo term
Awarded 2 July 2017Expired 1 July 2018
About
The University of Warwick awarded a contract to Ultratech Inc.
for an Atomic Layer Deposition System for the School of Engineering Department.
The system is designed for deposition of thin films on a range of substrates and includes plasma-enhanced and thermal deposition capabilities with a fully integrated load lock.
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Award of Atomic Layer Deposition System to Ultratech Inc. by University of Warwick
Won by Ultratech Inc. · The University of Warwick
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Turnkey FTIR System for Continuous DRE Monitoring of Semiconductor Abatement Systems – Swansea UniversityResearch & Development · Closes 9 Nov 2026
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